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Microoptoelectromechanical systems

Microoptoelectromechanical systems is a physics topic covered in the lgStudy science library. This page brings together a partial reference excerpt, illustrations, worked examples, real-world applications and a short study plan, so you can understand Microoptoelectromechanical systems rather than just read about it. In short: Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size. MOEMS includes a wide variety of devices, for example optical switch, optical cross-connect, tunable VCSEL, microbolometers.

Microoptoelectromechanical systems — main illustration
Microoptoelectromechanical systems — illustration

Key takeaways

  • Microoptoelectromechanical systems belongs to physics; place it in that map before memorising details.
  • Learn the definition first, then one example that makes the definition concrete.
  • Connect Microoptoelectromechanical systems to a quantity you can measure, compute or draw — that is where exam questions come from.
  • Reproduce the core statement of Microoptoelectromechanical systems from memory before moving on to harder problems.

Reference excerpt

Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size. MOEMS includes a wide variety of devices, for example optical switch, optical cross-connect, tunable VCSEL, microbolometers. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, silicon dioxide, silicon nitride and gallium arsenide.

Merging technologies

MOEMS includes two major technologies, microelectromechanical systems and micro-optics. Both these two technologies independently involve in batch processing similar to integrated circuits, and micromachining similar to fabrication of microsensor.

History of MOEMS During 1991-1993, Dr. M. Edward Motamedi, a former Rockwell International innovator in the areas of both microelectromechanical systems and micro-optics, used internally the acronym of MOEMS for microoptoelectromechanical systems. This was to distinguish between optical MEMS and MOEMS, where optical MEMS could include bulk optics but MOEMS is truly based on microtechnology where MOEMS devices are batch-processed exactly like integrated circuits, but this is not true in most cases for optical MEMS. In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego. In this talk Dr. Motamedi introduced the figure below, for showing that MOEMS is the interaction of three major microtechnologies; namely micro-optics, micromechanics, and microelectronics.

See also Microoptomechanical systems Nanoelectromechanical systems Microfabrication Microscanner

References

Bibliography Rai-Choudhury, P., ed. (2000). MEMS and MOEMS. Technology and applications. SPIE Press. ISBN 978-0-8194-3716-7. Solgaard, O.; Godil, A.A.; Howe, R.T.; Lee, L.P.; Peter, Y.-A.; Zappe, H. (June 2014). "Optical MEMS: From micromirrors to complex systems". Journal of Microelectromechanical Systems. 23 (3): 517–538. Bibcode:2014JMemS..23..517S. doi:10.1109/JMEMS.2014.2319266.

Illustrations

Microoptoelectromechanical systems: Diagram of a digital micromirror showing the mirror mounted on the suspended yoke with the torsion spring running bottom left to top right (light grey), with the electrostatic pads of the memory cells below (top left and bottom right)
Diagram of a digital micromirror showing the mirror mounted on the suspended yoke with the torsion spring running bottom left to top right (light grey), with the electrostatic pads of the memory cells below (top left and bottom right)
Microoptoelectromechanical systems: DLP CINEMA. A Texas Instruments Technology
DLP CINEMA. A Texas Instruments Technology

Worked examples

Example 1 — a first encounter with Microoptoelectromechanical systems

Start with the simplest possible case. Write down what Microoptoelectromechanical systems claims or describes in one sentence, then invent the smallest concrete situation in which that sentence is true. In physics, the smallest case is usually a single object, a single equation or a single measurement. Check that every symbol or term in your sentence has a meaning in that case.

Example 2 — changing one variable

Take the situation from Example 1 and change exactly one quantity: double it, halve it, or set it to zero. Predict what should happen to Microoptoelectromechanical systems before you calculate. Comparing your prediction with the result is the fastest way to find out whether you understand the idea or only the words.

Example 3 — an exam-style question

Typical questions about Microoptoelectromechanical systems ask you to (a) state it precisely, (b) apply it to given data, and (c) explain a limitation. Practise writing all three answers in under five minutes; the third part is what separates a full-mark answer from an average one.

Applications of Microoptoelectromechanical systems

In research
Microoptoelectromechanical systems appears in physics research whenever the underlying quantities have to be modelled precisely. Papers usually cite it as a starting assumption and then explore where it breaks down.
In technology and industry
Engineering practice reuses Microoptoelectromechanical systems in design rules, simulations and safety margins. Knowing the idea lets you read a specification sheet and understand why the numbers look the way they do.
In the classroom
Microoptoelectromechanical systems is common in secondary-school and first-year university syllabi. It links to neighbouring topics Optoelectronics, so understanding it makes those chapters shorter.
In everyday life
Look for Microoptoelectromechanical systems outside the textbook — in sport, cooking, traffic, electronics or the sky above you. An example you found yourself is remembered far longer than one you were given.

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How to study Microoptoelectromechanical systems in 20 minutes

  1. Read the reference excerpt below once, without taking notes.
  2. Close the page and write down what Microoptoelectromechanical systems means in your own words.
  3. Compare your version with the excerpt and mark what you missed.
  4. Work through the three examples above with pen and paper.
  5. Explain Microoptoelectromechanical systems out loud to somebody else — or to Teacher Smith in the lgStudy chat.

Frequently asked questions

What is Microoptoelectromechanical systems in simple terms?

Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size. MOEMS includes a wide variety of devices, for example optical switch, optical cross-conn…

Why does Microoptoelectromechanical systems matter?

Because it connects several physics ideas at once: it gives you a definition you can apply, a quantity you can calculate, and a way to check whether a result is plausible.

How should I study Microoptoelectromechanical systems?

Read the excerpt, restate it from memory, then work through the examples and applications listed on this page. The five-step study plan above takes about twenty minutes.

What does this page cover?

It gives you a compact reference excerpt plus original lgStudy explanations, examples, applications and study material on Microoptoelectromechanical systems.

Tags

  • Optoelectronics

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