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Wikipedia

Multilayer soft lithography

Multilayer soft lithography (MSL) is a fabrication process in which microscopic chambers, channels, valves and vias are molded within bonded layers of elastomer. Commercial PDMS stamps can mold materials such as optical adhesive in a sequential process to create the bonded layers.

See also Soft lithography

References

Tags

  • Lithography (microfabrication)
  • Technology stubs