Sample preparation equipment refers to equipment used for the preparation of physical specimens for subsequent microscopy or related disciplines - including failure analysis and quality control. The equipment includes the following types of machinery:
Precision cross-sectioning saws Precision lapping & polishing machines Selected Area Preparation Systems Decapsulation machinery (using mechanical, chemical/ 'jet etching' acid, laser and plasma methodologies) Focused ion beam (FIB) systems Anti-reflective coating systems Dimpling equipment Sputter coating equipment Carbon and metal evaporation systems Each of these system types incorporates a wealth of accessories and consumable items which fit the particular system for a specific application.
External links Article from MATERIALS WORLD Journal discussing the various sample preparation disciplines that allow for failure analysis of electronic materials and components Article from ULTRA TEC Web-site discussing the backside sample preparation of a packaged electronic device that allow for (through silicon) backside analysis Article discussing the applications of jet etch equipment