Standard cubic centimeters per minute (SCCM) is a unit used to quantify the flow rate of a fluid. 1 SCCM is identical to 1 cm³STP/min. Another expression of it would be Nml/min. These standard conditions vary according to different regulatory bodies. One example of standard conditions for the calculation of SCCM is T n {\displaystyle T_{n}} = 0 °C (273.15 K) and p n {\displaystyle p_{n}} = 1.01 bar (14.72 psia) and a unity compressibility factor Z n {\displaystyle Z_{n}} = 1 (i.e., an ideal gas is used for the definition of SCCM). This example is for the semi-conductor-manufacturing industry.
Conversion to mass flowrate and molar flowrate For conversion purposes, it is useful to think of one SCCM as the mass flow rate of one cubic centimeter per minute of a fluid, typically a gas, at a density defined at some standard temperature, T n {\displaystyle T_{n}} , and pressure, p n {\displaystyle p_{n}} . To convert one SCCM to the measure of mass flow rate in the SI system, kg/s, one relies in the fundamental relationship between mass flow rate and volumetric flow rate (see volumetric flow rate),
m ˙ = ρ n q ˙ , {\displaystyle {\dot {m}}=\rho _{n}{\dot {q}},}
where ρ n {\displaystyle \rho _{n}} is density at some standard conditions, and an equation of state such as
ρ n = p n M Z n R u T n , {\displaystyle \rho _{n}={\frac {p_{n}M}{Z_{n}R_{u}T_{n}}},}
with M {\displaystyle M} being the fluid molecular weight, Z n {\displaystyle Z_{n}} the fluid compressibility factor, and R u {\displaystyle R_{u}} the universal gas constant. By including units of measurement between square brackets in the above relationship between m ˙ {\displaystyle {\dot {m}}} and q ˙ {\displaystyle {\dot {q}}} one obtains
m ˙ [ k g s ] = ρ n [ k g m 3 ] q ˙ [ c m 3 m i n ] , {\displaystyle {\dot {m}}\left[{\frac {\rm {kg}}{\rm {s}}}\right]=\rho _{n}\left[{\frac {\rm {kg}}{\rm {{m}^{3}}}}\right]{\dot {q}}\left[{\frac {cm^{3}}{min}}\right],}
where m ˙ {\displaystyle {\dot {m}}} is in k g / s {\displaystyle kg/s} , ρ n {\displaystyle \rho _{n}} in k g / m 3 {\displaystyle kg/m^{3}} , and q ˙ {\displaystyle {\dot {q}}} is in c m 3 / m i n {\displaystyle cm^{3}/min} . This expression facilitates choosing a comfortable one, to convert units by multiplying as here
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