Technology CAD

Technology computer-aided design (technology CAD or TCAD) is a branch of electronic design automation (EDA) that models semiconductor fabrication and semiconductor device operation. The modeling of the fabrication is termed process TCAD, while the modeling of the device operation is termed device TCAD. Included are the modelling of process steps (such as diffusion and ion implantation), and modelling of the behavior of the electrical devices based on fundamental physics, such as the doping profiles of the devices. TCAD may also include the creation of "compact models" (such as the well known SPICE transistor models), which try to capture the electrical behavior of such devices but do not generally derive them from the underlying physics. SPICE simulator itself is usually considered as part of EDA rather than TCAD.

Introduction Technology files and design rules are essential building blocks of the integrated circuit design process. Their accuracy and robustness over process technology, its variability and the operating conditions of the IC—environmental, parasitic interactions and testing, including adverse conditions such as electro-static discharge—are critical in determining performance, yield and reliability. Development of these technology and design rule files involves an iterative process that crosses boundaries of technology and device development, product design and quality assurance. Modeling and simulation play a critical role in support of many aspects of this evolution process. The goals of TCAD start from the physical description of integrated circuit devices, considering both the physical configuration and related device properties, and build the links between the broad range of physics and electrical behavior models that support circuit design. Physics-based modeling of devices, in distributed and lumped forms, is an essential part of the IC process development. It seeks to quantify the underlying understanding of the technology and abstract that knowledge to the device design level, including extraction of the key parameters that support circuit design and statistical metrology. Although the emphasis here is on metal oxide semiconductor (MOS) transistors—the workhorse of the IC industry—it is useful to briefly overview the development history of the modeling tools and methodology that has set the stage for the present state-of-the-art.

History The evolution of technology computer-aided design (TCAD)—the synergistic combination of process, device and circuit simulation and modeling tools—finds its roots in bipolar technology, starting in the late 1960s, and the challenges of junction isolated, double-and triple-diffused transistors. These devices and technology were the basis of the first integrated circuits; nonetheless, many of the scaling issues and underlying physical effects are integral to IC design, even after four decades of IC development. With these early generations of IC, process variability and parametric yield were an issue—a theme that will reemerge as a controlling factor in future IC technology as well. Process control issues—both for the intrinsic devices and all the associated parasitics—presented formidable challenges and mandated the development of a range of advanced physical models for process and device simulation. Starting in the late 1960s and into the 1970s, the modeling approaches exploited were dominantly one- and two-dimensional simulators. While TCAD in these early generations showed exciting promise in addressing the physics-oriented challenges of bipolar technology, the superior scalability and power consumption of MOS technology revolutionized the IC industry. By the mid-1980s, CMOS became the dominant driver for integrated electronics. Nonetheless, these early TCAD developments set the stage for their growth and broad deployment as an essential toolset that has leveraged technology development through the VLSI and ULSI eras which are now the mainstream. IC development for more than a quarter-century has been dominated by the MOS technology. In the 1970s and 1980s NMOS was favored owing to speed and area advantages, coupled with technology limitations and concerns related to isolation, parasitic effects and process complexity. During that era of NMOS-dominated LSI and the emergence of VLSI, the fundamental scaling laws of MOS technology were codified and broadly applied. It was also during this period that TCAD reached maturity in terms of realizing robust process modeling (primarily one-dimensional) which then became an integral technology design tool, used universally across the industry. At the same time device simulation, dominantly two-dimensional owing to the nature of MOS devices, became the work-horse of technologists in the design and scaling of devices. The transition from NMOS to CMOS technology resulted in the necessity of tightly coupled and fully 2D simulators for process and device simulations. This third generation of TCAD tools became critical to address the full complexity of twin-well CMOS technology (see Figure 3a), including issues of design rules and parasitic effects such as latchup. An abbreviated but prospective view of this period, through the mid-1980s, is given in; and from the point of view of how TCAD tools were used in the design process.

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